Mechanics of Microelectromechanical Systems
Lobontiu N., Garcia E.
This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy.
Categorías:
Año:
2005
Editorial:
Kluwer Academic
Idioma:
english
Páginas:
419
ISBN 10:
1402080131
ISBN 13:
9781402080135
Archivo:
PDF, 12.64 MB
IPFS:
,
english, 2005